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G03100 - SEMI G31 - Test Method for Determining the Abrasive Characteristics of Molding Compounds StdTpc-Molding Compounds The purpose of this Document
G03100 - SEMI G31 - Test Method for Determining the Abrasive Characteristics of Molding Compounds StdTpc-Molding Compounds The purpose of this Document
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Description
The purpose of this Document is to outline the test method for electronic pressure transducers used in gas delivery systems for semiconductor processing
if not all
SEMI E126-0308 (technical revision)
orgで入手可能となる。初版は2001年発行。前版は2006年11月発行。
G03100 - SEMI G31 - Test Method for Determining the Abrasive Characteristics of Molding Compounds StdTpc-Molding Compounds The purpose of this DocumentThis document describes the method to measure the abrasive characteristics of molding compounds by measuring mold orifice weight loss as a function of molded volume. Referenced SEMI Standards None.
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