E03700 - SEMI E37 - 高速SECSメッセージサービス（HSMS）汎用サービス StdPbc-0824 本基準適用於連接至使用者設施排氣通風系統之可排氣通風的半導體製造設備。

本基準適用於連接至使用者設施排氣通風系統之可排氣通風的半導體製造設備。

XML is used in software applications to encode information with tags that provide structure and data type information specified in XML Schemas

This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment

SEMI E111-0117 (technical revision)

E03700 - SEMI E37 - 高速SECSメッセージサービス（HSMS）汎用サービス StdPbc-0824 本基準適用於連接至使用者設施排氣通風系統之可排氣通風的半導體製造設備。SECSHSMS HSMSSEME4SECS IHSMSHSMSSEMIE4 SECS I HSMSOSITCP IPSEMI E13 SECS HSMS Subordinate Standards: SEMI E37. 1 0702 (Reapproved 0413) High Speed SECS Message Services Single Selected Session Mode (HSMS SS) SEMI E37. 2 95 (Withdrawn 1109) High Speed SECS Message Services General Session (HSMS GS) Referenced SEMI StandardsSEMI E4 Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS I) SEMI E5 Specification for SEMI