G08100 - SEMI G81 - Specification for Map Data Items StdDcs-Current 2 to 20 mm and

2 to 20 mm and within the fixed quality area (FQA)

SEMI D50-0707 (first published)

These conditions may include any aspects of the measurement system affecting the measurement results directly or indirectly (e

bumps or waves on the wafer surface that vary in peak to valley height from a few nanometers to a several hundred nanometers

G08100 - SEMI G81 - Specification for Map Data Items StdDcs-Current 2 to 20 mm andThis Document describes the data items that relate to electronic substrate mapping. This Document applies only to substrate map data items. This Document does not address the transmission, file naming conventions, storage or archiving of substrate maps. The Specification of which data items are optional and which are required is not specified in this Document. The size of each data item described in this Document is maximum size. The actual size may