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M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 StdVol-Safety Guidelines For the purpose of this

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For the purpose of this test HCl is the preferred test gas

Wafer thickness and diameter for this Test Method is limited only by the range of microscope stage motions available

for both front opening shipping box (FOSB) labels and bag labels

and the general map data format document

M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 StdVol-Safety Guidelines For the purpose of thisGaAs Referenced SEMI Standards None.

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