E00100 - SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様 Revision:SEMI E1-1110 - Superseded SEMI S13 — Environmental

SEMI S13 — Environmental

1  This Guide does not include site-specific conditions

approaches suitable for use in smaller facilities are outlined in Related Information 1

Health and Safety Guideline for Semiconductor Manufacturing Equipment

E00100 - SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様 Revision:SEMI E1-1110 - Superseded SEMI S13 — EnvironmentalNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI 3100 mm125 mm150 mm200 mm 3100 mm125 mm150 mm 125 mm 200 mm Referenced SEMI Standards (purchase separately) None.